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Olympus OLS5100

Classification:

Optics

Product Name:

Microscopy

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Description
Parameters

● Norm

Hosts

Model		OLS5100-SAF	OLS5100-SMF	OLS5100-LAF	OLS5100-EAF
Total magnification		54x–17,280x
Field of view		16 µm–5,120 µm
Measuring principle	Optical system	Reflective Confocal Laser Scanning Laser Microscope Reflective Confocal Laser Scanning Laser-DIC Microscope Color Color DIC
Measuring principle	Optical receiver	Laser: Photomultiplier (2 channels) Color: CMOS color camera
Height measurement	Display resolution	0.5 nm
Height measurement	Dynamic range	16-bit
Height measurement	Repeatable σn _-1^{1 2 *5}	5X：0.45 μm, 10X：0.1 μm, 20X：0.03 μm, 50X：0.012 μm, 100X：0.012 μm
Height measurement	Accuracy^{1 3 *5}	0.15 + L / 100μm（L：Measuring length[μm]）
Height measurement	Stitching Image Accuracy ^{1 3 *5}	10X：5.0+L/100 μm, 20X or Higher magnification1.0+L/100 μm (L: Splice length[μm])
Height measurement	Measurement noise (Sq noise)^{1 4 *5}	1 nm（typical value）
Width measurement	Display resolution	1 nm
Width measurement	Repeatable 3σ_n-1 ^{1 2 *5}	5X：0.4 μm, 10X：0.2 μm, 20X：0.05 μm, 50X：0.04 μm, 100X：0.02 μm
Width measurement	Accuracy ^{1 3 *5}	measured value+/- 1.5%
Width measurement	Stitching Image Accuracy ^{1 3 *5}	10X：24+0.5L μm, 20X：15+0.5L μm, 50X：9+0.5L μm, 100X：7+0.5L μm (L：Splice length[mm]）
Maximum number of measurement points for a single measurement		4096 × 4096 px
Maximum number of measuring points		3600 Wpx
XY Table Configuration	Length Measurement Module	•	inapplicable	inapplicable	•
XY Table Configuration	Scope of work	100 × 100 mm (3.9 × 3.9 in.) electric powered	100 × 100 mm (3.9 × 3.9 in.) manually operated	300 × 300 mm (11.8 × 11.8 in.) electric powered	100 × 100 mm (3.9 × 3.9 in.) electric powered
Maximum sample height		100 × 100 mm (3.9 × 3.9 in.)	30 mm (1.2 in.)	30 mm (1.2 in.)	210 mm (8.3 in.)
Laser light source	Wavelength	405 nm
Laser light source	Maximum output	0.95 mW
Laser light source	Laser class	Level 2（IEC60825-1：2007，IEC60825-1：2014）
Color light source		White lightLED
Electrical power		240 W	240 W	278 W	240 W
Mass	Main body of the microscope	Approx. 31 kg	Approx. 32 kg	Approx. 50 kg	Approx. 43 kg
Mass	Control box	Approx. 12 kg

Objective

Range	Model	Numerical Aperture（NA）	Working distance（WD）（mm）
UIS2? Objective	MPLFLN2.5x	0.08	10.7
UIS2? Objective	MPLFLN5x	0.15	20
Specialized LEXT Objective Lenses（10X）	MPLFLN10xLEXT	0.3	10.4
Specialized LEXT objective lens (high performance type)	MPLAPON20xLEXT	0.6	1
	MPLAPON50xLEXT	0.95	0.35
	MPLAPON100xLEXT	0.95	0.35
Specialized LEXT objective lens (long working distance type)	LMPLFLN20xLEXT	0.45	6.5
	LMPLFLN50xLEXT	0.6	5.2
	LMPLFLN100xLEXT	0.8	3.4
Extra long working distance objective lens	SLMPLN20x	0.25	25
	SLMPLN50x	0.35	18
	SLMPLN100x	0.6	7.6
Long working distance objective lens for LCD samples	LCPLFLN20xLCD	0.45	8.3-7.4
	LCPLFLN50xLCD	0.7	3.0-2.2
	LCPLFLN100xLCD	0.85	1.2-0.9