INFICON CDG100D

Classification:

Electrical

Product Name:

Pressure Measuring Instruments

CDG100D gauges are temperature controlled at 100°C and have superior performance in demanding semiconductor and plasma processes. They are available in full scales from 100MTERR to 1000TERR, with all common flange types and fieldbus interfaces, and provide a linear 0 to 10V, gas type independent, pressure signal. Resistive capacitance manometers use corrosion-resistant, ultra-pure aluminum oxide ceramic diaphragms.

● Vantage

(1) Lower CoO (Cost of Ownership), 50% faster warm-up, energy efficient and low power consumption

(2) Easy integration, wide variety of full scales, flanges, and interfaces, two setpoints standard

(3) Simple one-button or remote signal zero command with adjustable zero offset

(4) Diagnostic port for fast repair and maintenance

(5) Two-year warranty for longer service life, advanced heating concept and instrument protection

(6) No need for long-term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications

(7) Conformity and Standards: CE, EN, UL, SEMI, RoHS

● Typical Application

(1) Etching, CVD, PVD and other semiconductor production processes

(2) Chemical and corrosive high temperature processes

(3) General thin film and vacuum processes requiring instrumentation protection