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DISCO DFL7340

Classification:

Laser Equipment

Product Name:

Fully automated lasers


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  • Description
  • Parameters
  • ●  Quantitative

    Fully automatic mode

    200mm wafers

    ●  X-axis:

    进给速度:1.0–1000 mm/s

    ●  Y-axis:

    Indexing step: 0.1µm

    Positional accuracy: 3µm

    ●  Z-axis:

    Movement resolution: 0.1µm

    Repeatability: 1µm

    ● Coordinate axis:

    Maximum angle of rotation: 380°
     

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