DISCO DFL7340
Classification:
Laser Equipment
Product Name:
Fully automated lasers
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- Description
- Parameters
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● Quantitative
Fully automatic mode
200mm wafers
● X-axis:
进给速度:1.0–1000 mm/s
● Y-axis:
Indexing step: 0.1µm
Positional accuracy: 3µm
● Z-axis:
Movement resolution: 0.1µm
Repeatability: 1µm
● Coordinate axis:
Maximum angle of rotation: 380°
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Address: Room 102, Building 23, No. 88, Haidian Road, Hecheng Street, Gaoming District, Foshan City, Guangdong Province, China

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