SMC XLH-25
Classification:
Gases, Liquids, Vacuum Systems
Product Name:
Gas Angle Valve
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- Description
- Parameters
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● Characterization
(1) Airbox type particle free and clean
(2) Low drive torque (0.5n.m or less)
(3) Spring provides standard sealing loads
(4) Handle height remains constant whether the valve is open or closed.
(5) An indicator to confirm whether the valve is open or closed is fitted as standard.
(6) Its low outgassing allows the use of a smaller pump capacity, helping to minimize venting time.
(7) It does not contain heavy metals such as nickel or chromium.
(8) The low sputtering rate minimizes heavy metal contamination of wafers.
● Norm
Type Manual Vacuum Valve Application Single item Operating Installation Method Direct Number of Ports 2-Port Valve Flange Type KF Flange Size Nominal 25 Seal Type Bellows Seal Sonic Conductance 14L/S Seal Material FKM 1349-80 Amount of
leakage(Pam3/s)
内Internal: 1.3 * 10-10,Extenal: 13 * 10-11
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