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MKS Series 354

Classification:

Gases, Liquids, Vacuum Systems

Product Name:

Vacuum Gauge Module

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Description
Parameters

The MKS Micro-Ion® Gauge Module combines the world’s smallest ionization gauge with the control electronics to create a compact, convenient, reliable, and cost-saving solution for many high vacuum applications. The Micro-Ion gauge includes many features that provide for a much more accurate and repeatable measurement than traditional Bayard-Alpert gauges from 5 x 10-2 Torr to 10-9 Torr. The all-metal package provides a rugged enclosure and a high level of immunity to electrical noise. High performance in a small volume is achieved though a number of enhancements including a patented dual ion collector design that optimizes electron motion and ion collection. Modules are available with analog output, RS-485 or DeviceNetTM interfaces. The analog output and DeviceNet versions have a digital display option for convenient, point-of-use pressure readout.

● Benefits and Features

(1) Compact, convenient, reliable and cost-saving vacuum measurement

(2) Vacuum pressure measurement 10-9 torr (10-9 mbar, 10-7 Pa)

(3) Dual filaments increase unit uptime

(4) Ultra-clean construction for fast pump down response

(5) Rugged, all-metal, CE-compliant RF and noise immunization module

(6) Optional local display aids in setup and diagnostics

(7) RS-485 and DeviceNet digital interface available

(8) Provides higher long-term stability than conventional designs

● Norm

Atmosphere and N₂^{Comment (1),(2),(3)} Measuring range
Thor			1 x 10⁹ 至 5 x 10²
Millibar			1 x 10⁹ 至 7 x 10²
Wrap			1 x 107 至 7
Discharge current			0.1 或 4 mA
Degas			Electron bombardment, 3 W with 2-minute timer
Overpressure protection			Gauge turns off at factory set upper pressure limit
Weights			370 gm (12 oz) with NW16KF flange
Required power supply			24 VDC +15%12 W max
Operating temperature			0°C to 40°C ambient, non-condensing
Non-operating temperature			-40°C to 70°C
Housing Material			Aluminum extrusion
CE compliant
Electromagnetic Compatibility Directive			2004/108/EC; EN61326-1
Low Voltage Directive			2006/95/EC; EN61010-1
Analog output version			1 Volt/decade, logarithmic, 0 to 9 V
Filament control			Toggle switch on top of module
Input signal			Filament on/off, degas on/off and emission current are set by continuity to ground
Output signal			Filament and degas on/off status are determined by an open collector transistor
Connectors			9-pin D male
Display（Options ）			2 digits plus exponent, green LED
RS-485 Interface Versions			RS-485 with one setpoint relay
Adjustable parameters			Filament on/off, degas on/off, emission current select, filament select, setpoint (value, direction and hysteresis)
Baud			19200 Baud (default value)
Data Format			ASCll, 8 data bits, one stop-bit, no parity, no handshake (default values)
Relay Configuration			Single-pole, double-throw (SPDT)
Relay contact ratings			1 A at 30 VDC resistive load, 0.5 A at 125 VAC non-inductive
Connectors			9-pin D male
DeviceNet Interface Version +0.08mm
Pass on information			Polled IO and explicit
Data rate			125. 250 or 500 kbaud, switch selectable
Address			0 to 63, selected by using the Low and High address switches
Microionometer
Sensitivity			20/Torr, 15/mbar, 0.15/Pa
X-ray Limit			< 3 x 10·10 Torr, < 4 x 10-10 mbar, < 4 X10-0 Pa^{see note (3)}
Filament Materials			Yttria-coated iridium or tungsten ^{see note} ^（4)
Other Materials Exposed to Gas			304 stainless steel, alumina, tantalum, tungsten, CuAg eutectic, Kovar®
Internal Gauge Volume			10.8 cm2 (0.66 in.) to the port screen
Gauge Bakeout Temperature			200°C maximum (with electronics removed)